The Formation of Thin Film Resistors by Ion Implantation of Metal Films
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منابع مشابه
Influence of Ni Deposition and Subsequent N+ Ion Implantation at Different Implantation Energies on Nano-Structure and Corrosion Behavior of 316 Stainless Steels
Nickel films of 300 nm thickness were deposited by electron beam evaporation at room temperature on 316 stainless steels. Corrosion studies of Ni coated 316 SS have been performed after N+ ion implantation at different energies of 20, 40, 60 and 80 keV. The structure and surface morphology of the films were evaluated using X-ray diffraction (XRD), atomic force microscope (AFM) an...
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